Product List
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COMBINATION BEARINGS
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A long-life bearing mechanism reduces maintenance costs.
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The pump can be used in combination with a small backing pump.
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The pump can be mounted in any orientation.
TYPES WITH INTEGRATED POWER SUPPLY UNIT
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Compact
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Energy-saving
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No need to install cables or use a control rack
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Improved pumping performance
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No separate power supply is necessary because AC power supply is directly input.
WIDE - RANGE (03) SERIES
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Wide-range and high pumping throughput
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Digital power supply supported
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Various monitoring functions
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Network connection enabled
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Compliant with CE marking, SEMI S2, and NRTL
HIGH PUMPING THROUGHPUT TYPE
Turbomolecular pump
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Magnetically levitated
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Intregrated power supply
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Maximum pumping flowrate
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Excellent corrosion resistance
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Compact power supply unit
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Measures against reaction products (optional)
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Various monitoring functions
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Network connection enabled
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Variable pump speed
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Reduced power consumption
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Compliant with major standards
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Tuning-free
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Battery-less
HIGH COMPRESSION RATIO TYPE
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Hydrogen compression ratio of 106
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Battery-less turbomolecular pump with magnetic levitation
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Compact pump body and power supply unit
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Tuning-free
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RS-232C-compliant serial interface is equipped as standard.
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Compliant with CCE marking, SEMI-S2, and NRTL