Belt type vacuum pump Displacement speed : 150-600 l/min Ultimate pressure : 5x10-4 torr
Multistage dry vacuum pump Displacement speed : 80-720 m3/hr Ultimate pressure : 3x10-3 torr
Piston rotary pump Displacement speed : 1500-15000 l/min Ultimate pressure : 0.005 torr
Root vacuum pump Displacement speed : 150-2880 m3/hr Ultimate pressure (with 2 stage backing pump) : 0.00005 torr